resistance ET Wafer position Grp
5.22 1 1 1 1/1
5.61 1 1 2 1/1
6.11 1 1 3 1/1
6.33 1 1 4 1/1
6.13 1 2 1 1/2
6.14 1 2 2 1/2
5.6 1 2 3 1/2
5.91 1 2 4 1/2
5.49 1 3 1 1/3
4.6 1 3 2 1/3
4.95 1 3 3 1/3
5.42 1 3 4 1/3
5.78 2 1 1 2/1
6.52 2 1 2 2/1
5.9 2 1 3 2/1
5.67 2 1 4 2/1
5.77 2 2 1 2/2
6.23 2 2 2 2/2
5.57 2 2 3 2/2
5.96 2 2 4 2/2
6.43 2 3 1 2/3
5.81 2 3 2 2/3
5.83 2 3 3 2/3
6.12 2 3 4 2/3
5.66 3 1 1 3/1
6.25 3 1 2 3/1
5.46 3 1 3 3/1
5.08 3 1 4 3/1
6.53 3 2 1 3/2
6.5 3 2 2 3/2
6.23 3 2 3 3/2
6.84 3 2 4 3/2
6.22 3 3 1 3/3
6.29 3 3 2 3/3
5.63 3 3 3 3/3
6.36 3 3 4 3/3
6.75 4 1 1 4/1
6.97 4 1 2 4/1
6.02 4 1 3 4/1
6.88 4 1 4 4/1
6.22 4 2 1 4/2
6.54 4 2 2 4/2
6.12 4 2 3 4/2
6.61 4 2 4 4/2
6.05 4 3 1 4/3
6.15 4 3 2 4/3
5.55 4 3 3 4/3
6.13 4 3 4 4/3